|
Textbooks:
course book :
Fabrication Engineering at the Micro- and Nanoscale, 4th
Edition 2013, Stephen A Campbell, Oxford University Press.
ISBN 978-0-19-986122-4.
The students may aquire knowledge of the topics the book
deals with from other textbooks.
If you are not familiar with the physics behind what the
book presents, you should learn that. Typically this might
be from solid state physics and material science books.
Below is a list of books which deals with some of the
same topics as the text book but with a varying degree
of depth in different fields.
- The Science and Engineering of
Microelectronic Fabrication, 2nd Ed.,, Stephen A Campbell,
Oxford University Press,(only slightly less up to date
than the ttextbook)
- Electronic Materials Science: for
Integrated Circuits in Si and GaAs, J. W. Mayer and S. S.
Lau, Macmillan, ISBN 0-02-378140-8.
- VLSI Technology, 2nd Edition, S.M. Sze,
McGraw Hill, ISBN 0-07-100347-9.
- Intuitive IC Electronics, 2nd Edition,
McGraw Hill, ISBN 0-07-021969-9.
- Electronic Structure and Properies of
Semiconductors W. Schrøter in Material Scence and
Technology; Edited by R. W. Cahn, P. Haasen, E. J. Kramer
Vol 4,VCH Publishers Inc, 1991 ISBN 3-527-26817
- Processing of Semiconductors, K. A.
Jackson ( Volume Editor) in Material Scence and
Technology; Edited by R. W. Cahn, P. Haasen, E. J. Kramer
Vol 16 ,VCH Publishers Inc, 1996 ISBN 3-527-26813-8
- Electronic Materials; Science and
Technology. S. P. Murarka and M.C. Peckerar, Academic
Press, 1989, ISBN 0-12-511120-7
- The Physics of Micro/Nano-Fabrication, I.
Brodie and J.J.Muray, Plenu Press 1992, ISBN 0-306-44146-2
- Microelectronic Materials, C.R.M Grovenor,
Adam Hilger, 1989) ISBN 095274-270-39paperback)
- Semiconductor Mateial and Device
Characterization D. K. Schroder, Wiley Interscience 1990,
- Physics of Semiconductor Devices, 2nd
Edition, S.M. Sze, Wiley, ISBN 0-471-09837-X
- Microelectronic Devices, E.S. Yang,
McGraw Hill, ISBN 0-07-072238-2
- Fundamentals of Grainboundary and
Interphase Boundary Diffusion" I. Kaus, Y. Mishin and W.
Gust, Wileynd Sons 1995 ISBN 0 471 93819 X
- Jaeger, Introduction to Microelectronic
Fabrication: Volume 5 of Modular Series on Solid State
Devices(Prentice Hall, 2nd edition, ISBN: 978-0201444940)
- Silicon VLSI Technology,Plummer,
Deal, Griffin, Fundamentals,
Practice, and Modeling (Prentice Hall, 1st edition, ISBN:
978-0130850379)
- Silicon Processing for the VLSI Era, Wolf,
Tauber,
Vol. 1: Process Technology (Lattice Press;
2nd edition, ISBN: 978-0961672164)
|